신소재공학부
2012-2 신기술 교육 특강 안내[나노종합팹센터 양준모 박사-양비룡교수]
- 작성자
- 백훈기
- 조회
- 1068
- 작성일
- 2012.11.13
특강 제목 : FE-(S)TEM을 이용한 나노분석
일 시 : 2012. 11. 27. 16:00~18:00
장 소 : 테크노관 301호
초청 강사 : 한국과학기술원 부설 나노종합팹센터 양준모팀장
특강 내용 : Nanoanalysis of Nanomaterials & Nanodevices by FE-(S)TEM
Not only the structural observation at the atomic scale but also compositional analysis at the subnanometer scale are indispensable for research and development of nanomaterials & nanodevices. A field-emission (scanning) transmission electron microscope [FE-(S)TEM] is ideal for nanoscale analyses due to the small and high-current probe size, typically less than 1nm with currents of 100 ？ 500 pA. Energy dispersive X-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS) are complementarily used for compositional analysis of nanostructures. The practical spatial resolution of EDS and EELS is evaluated to be 1 ？ 2 nm. The spatial resolution of EELS can attain subnanometer with annular dark-field (ADF) STEM detector. We will show analysis data of nanomaterials & nanodevices by FE-(S)TEM.
많은 참여와 관심을 바랍니다.